An approach to nanoglasses through anodic oxidation of sputtered aluminum on glass surface

摘要

The new process for the preparation of nanoglasses have been developed through anodic oxidation.The alunium thin film sputtered on the ITO thin film on the glass surface was decomposied into alumina by anodix oxidation technique.The alumina layer possessed nanometer size pore array standing on glass surface.The sizes of the pore was widened by acid etching from 10-20 nm to a few hundred nm.The glass substrate having the alumina nanostructures on the surface could transmit the UV and visible light at the wavelength range of 200 approx 800nm.