An XPS and XRD study of physical and chemical homogeneity of Pb(Zr, Ti)O{sub}3 thin films obtained by pulsed laser deposition

摘要

Pb(Zr, Ti)O{sub}3 (PZT) oriented films deposited by laser ablation on Au(111)/Si(111) have been tested by different techniques for their physico-chemical homogeneity. The samples have been divided in different zones, in order to verify the existence of chemical and structural differences between different regions. Few techniques like X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) have been employed for characterization. XRD analyses showed differences regarding the crystallographic content and the degree of orientation between zones subjected to the plasma arriving at different angles of incidence on the sample surface. In the same zones XPS studies have been performed by a VG ESCALAB 210 Spectrometer, using a non-monochromatic AlK{sub}α X-ray source (300 W) in the five channel hemispherical analyzer. Wide scans in the binding energy scale 0-1200 eV, at 50 eV analyzer pass energy, were collected both from the as received surface and after sputter cleaning in order to put into evidence all the constituents of the film. Narrow scans of Ti 2p, Zr 3d, Pb 4f and O 1s were also acquired at 20 eV and 0.1 eV/channel pass energy and 100 ms of dwell time in order to give a better insight into the chemical bonds form and a semiquantitative analyze of the present chemical species. The piezoelectric properties of different zones were also measured.