The production of electronic passive components: the electrochemical way

摘要

Electronic equipment for mobile and wireless communication operates at frequencies up to several GHz. These applications ask for a new generation of passive components (such as capacitors and inductors) with an excellent high frequency performance. Lithographic and electrochemical processes are particularly suitable for the production of large quantities of these miniaturized and high precision passive components. Electroplated copper is an excellent material for inductors in the form of a coil with typical dimensions and patterns of 25 μm width and 10 μm height. Two copper electroplating solutions were studied for the application. The process flow and the influence of the process parameters on the inductor properties will be discussed.