THE CURRENT STATUS AND FUTURE TRENDS OF SEMOX/SOI, NEW TECHNOLOGICAL APPLICATIONS OF THE SIC/SOI SYSTEM

机译：SEMOX / SOI的当前状态和未来趋势，SIC / SOI系统的新技术应用

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

The state of the art of the Silicon On Insulator (SOI) technology is presented The significant difference in the formation of thermally grown oxide and the buried oxide (BOX) produced by high dose oxygen implantation in silicon (SIMOX) will be highlighted. The different sources of the defects in the Si-overlayer and the SiO_2 buried layer produced during implantation and annealing treatment including Si-islands formation and strained Si-Si bonds in the BOX are discussed. A comparative study of the two most successful technologies SIMOX and wafer bonding is included. The feasibility to extend the SOI structures in the SiC is shown.

机译：在绝缘体（SOI）技术上的硅技术的状态被突出地介绍了通过高剂量氧气植入（SIMOX）产生的热生长氧化物和掩埋氧化物（盒）的显着差异。讨论了在植入和退火处理期间产生的Si-覆盖物和SiO_2掩埋层中的缺陷的不同来源，包括盒子中的Si-illss形成和紧张的Si-Si键。包括两个最成功的技术SIMOX和晶片键合的比较研究。示出了在SiC中扩展SOI结构的可行性。

著录项

来源
《NATO advanced research workshop on fundamental aspects of ultrathin dielectrics on si-based devices : Towards an atomic scale understanding》|1998年||共15页
会议地点
作者

展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类 TN304.12;
关键词

相似文献

外文文献
中文文献
专利

1. Surface soil moisture retrievals from remote sensing: Current status, products & future trends [J] . Petropoulos George P., Ireland Gareth, Barrett Brian Physics and chemistry of the earth . 2015,第Null期

机译：通过遥感获取地表土壤水分：现状，产品和未来趋势
2. Biochar application to low fertility soils: A review of current status, and future prospects [J] . El-Naggar Ali, Lee Sang Soo, Rinklebe Joerg, Geoderma: An International Journal of Soil Science . 2019,第期

机译：生物炭应用于低生育土壤：对现状的审查，以及未来的前景
3. Future trends in soil cadmium concentration under current cadmium fluxes to European agricultural soils [J] . L. Six, E. Smolders Science of the total environment . 2014,第jula1期

机译：当前流入欧洲农业土壤的镉通量下土壤镉浓度的未来趋势
4. THE CURRENT STATUS AND FUTURE TRENDS OF SEMOX/SOI, NEW TECHNOLOGICAL APPLICATIONS OF THE SIC/SOI SYSTEM [C] . NATO advanced research workshop on fundamental aspects of ultrathin dielectrics on si-based devices : Towards an atomic scale understanding . 1998

机译：SEMOX / SOI的当前状态和未来趋势，SIC / SOI系统的新技术应用
5. Improving Knowledge of Permafrost-Affected Soils in Alaska - Field Data Collection and Sampling Design to Support Current and Future Soil Survey Initiatives [D] . Sousa, Michael Joseph. 2020

机译：提高阿拉斯加 - 现场数据收集和采样设计中永久性受影响的土壤的知识，以支持当前和未来的土壤调查举措
6. Phytoextraction of Cd-Contaminated Soils: Current Status and Future Challenges [O] . Jin-Tian Li, Alan J. M. Baker, Zhi-Hong Ye, -1

机译：植物提取镉污染土壤的现状和未来挑战
7. Book reviewsSlope stabilization and erosion control: a bioengineering approach. (1st edition.) MorganR. P. C. and RicksonR. J. (eds). E FN Spon, London, 1995. ISBN 0 419 15630 5, £47.50, 274 pp.Dredging: A handbook for engineers. (2nd edition.) BrayR. N., BatesA. D. and LandJ. M.. Arnold, London, 1997. ISBN 0 340 54524 0, US$225, 434 pp.Ground classification systems in tunnel construction. (1st edition.) CrabbG. I.. Transport Research Laboratory, 1997. ISSN 0968 4107, 30 pp.Recent developments in soil and pavement mechanics. (1st edition.) AlmeidaM. (ed.). A. A. Balkema, 1997. ISBN 90 5410 885 1, Hfl 165, 502 pp.Soil mechanics—concepts and applications. (1st edition.) PowrieW.. E FN Spon, 1997. ISBN 0 419 19720 6, £24.99 (paperback), 420 pp.Geotechnical engineering. (2nd edition.) LancellottaR.. A. A. Balkema, Amsterdam, 1995. ISBN 90 5410 179 2, £46.00 (paperbound) and 90 5410 178 4, £76 (hardbound), 440 pp.Fundamentals of earthquake prediction. (1st edition.) LomnitzC.. John Wiley Sons, New York, 1994. ISBN 0 471 57419 8, £75, 326 pp.Tunnel engineering handbook. (2nd edition.) BickelJ. O., KueselT. R. and KingE. H. (eds). Chapman and Hall, 1996. ISBN 0412 99291 4, £85, 544 pp.Tunnel boring machines—trends in design and construction of mechanized tunnelling. (1st edition.) WagnerH. and SchulterA. (eds). A. A. Balkema, Rotterdam, 1996. ISBN 90 5410 8118, Hfl 120, 260 pp.Deep excavations–a practical manual. (1st edition.) PullerM.. Thomas Telford, London, 1996. ISBN 0 7277 1987 4, £80, 435 pp.Barriers, liners and cover systems for containment and control of land contamination. (1st edition.) PrivettK. D., MatthewsS. C. and HodgesR. A.. Construction Industry Research and Information Association, Special Publication 124, 1996. ISBN 0 86017 437 9, £77.00 (£34.00 to CIRIA members), 278 pp.Earth reinforcement and soil structures. (3rd edition.) JonesC. J. F. P.. Thomas Telford and ASCE Press, 1996. ISBN 0 7277 2525 4, £45, 379 pp. [O] . A. V. D. Bica, L. A. Bressani, C. S. Covil, 1999

机译：书籍评论链稳定和侵蚀控制：生物工程方法。（第一个版本。）Morganr。 P. C.和Ricksonr。 J.（EDS）。 E＆Fn Spon，伦敦，1995. ISBN 0 419 15630 5，£47.50,274 PP.Dredge：工程师手册。（第2版。）Brayr。 N.，Batesa。 D.和Landj。 M ..Arnold，伦敦，1997. ISBN 0 340 54524 0，225美元，434个PP.Ground隧道施工分类系统。（第一个版本。）crabbg。 I ..运输研究实验室，1997年。ISSN 0968 4107,30 PP.Recent在土壤和路面力学的发展。（第1版。）Almeidam。（ed。）。 A. A. Balkema，1997. ISBN 90 5410 885 1，HFL 165,502 PP.Soil Mechanics-概念和应用。（第一版。）Pow威.. E＆Fn Spon，1997. Isbn 0 419 19720 6，£24.99（平装图），420 PP.GeoTechnical工程。（第2版。）兰肯塔.. A. A. Balkema，阿姆斯特丹，1995年。ISBN 90 5410 179 2，£46.00（纸张）和90 5410 178 4，£76（Sallbound），440 pp.Reatemake预测。（第1版。）Lomnitzc .. John Wiley＆Sons，纽约，1994. Isbn 0 471 57419 8，£75,326 PP.Tunnel工程手册。（第2版。）bickelj。 O.，Kueselt。 R.和Kinge。 H.（EDS）。 Chapman和Hall，1996。ISBN 0412 99291 4，£85,544 PP.Tunnel镗床 - 机械化隧道设计和构建的趋势。（第一个版本。）瓦格纳。和schultera。（EDS）。 A. A. Balkema，Rotterdam，1996。ISBN 90 5410 8118，HFL 120,260 PP.Deep挖掘 - 实用手册。（第1版。）拉米..托马斯特福，伦敦，1996。ISBN 0 7277 1987 4，£80,435 PP.Barriers，衬里和覆盖土地污染的控制和控制。（第一个版本。）privettk。 D.，Matthewss。 C.和hodgesr。 A ..建筑业研究和信息协会，特刊124,1996. ISBN 0 86017 437 9，£77.00（互联议员34.00英镑），278 PP.Earth加固和土壤结构。（第3版。）Jonesc。 J. F. P .. Thomas Telford和Asce Press，1996。ISBN 0 7277 2525 4，£45,379 PP。
8. Current Status and Future Trends of Cryogenic Coolers for Electronic Applications [R] . Stochl, C. A., Nolan, E. R. 1964

机译：电子应用低温冷却器的现状和未来趋势

THE CURRENT STATUS AND FUTURE TRENDS OF SEMOX/SOI, NEW TECHNOLOGICAL APPLICATIONS OF THE SIC/SOI SYSTEM

摘要

著录项

相似文献

相关主题

期刊订阅