An indentation creep analysis has been performed to investigate micro-mechanical properties of amorphous nitrogen-copntaining carbon films. Using results of the slope of the time-displacement relation of creep procedure, the strain rate sensitivity exponent m is obtained. The m value of 0.004 was obtained for diamond-like carbon film without nitrogen. In contrast, those were found to be in the range between 0.009 and 0.101 for nitrogen-containing carbon films. These slightly increased with increasing the nitrogen content of the films. Wepresent results that indicate that the nano-indentation creep technique enables clarification of the nano-structure of nitrogen-containing carbon films.
展开▼
