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Picosecond ultrasonics studies of the effect of ion implantation on interfacial bonding between a thin film and a substrate

机译:PicoSecond超声波研究离子植入对薄膜与基材界面粘合的影响

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We have used picosecond ultrasonics to study the effects of ion irradiation on the interfacial bonding between gold films and a silicon substrate. Acoustic vibrations are excited in the metal film when a picosecond light pulse is absorbed. The rate at which these vibrations damp out via sound transmission across the interface into the substrate gives a measure of the adhesion of the film to the substrate. The films wre irradiated with 2.5 MeV helium ions with doses between 7x10~(14) and 8x10~(16) ions cm~(-2). The adhesion, as measured by the rate of acoustic damping, was found to be significantly improved by the ion irradiation.
机译:我们使用PicoSecond超声波来研究离子照射对金膜和硅衬底之间的界面键合的影响。当皮秒光脉冲被吸收时,在金属膜中激发声振动。这些振动在界面上通过声音传输抑制基板的速率给出了膜到基板的粘附量。将薄膜用7×10〜(14)和8×10〜(16)离子Cm〜(2)之间的剂量照射2.5mev氦离子。发现通过声阻尼速率测量的粘附性通过离子照射显着改善。

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