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Observation of dislocation disappearance in aluminum thin films and consequences for thin-film properties

机译:铝薄膜脱臼消失的观察及薄膜特性的后果

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Dislocation structures in Al-Cu thin films have been studied by transmission electron microscopy (TEM). We have observed that the contrast of interface dislocations disappears in the electron beam. We assume that the contrast dissolution is due to the spreading of the dislocation core at the crystalline/amorphous interface or due to a diffusive movement of the dislocation through the oxide. In any case, the relaxation is assumed to be controled by irradiation induced diffusion. As a consequence, the short range stresses and at least partly also the long range stresses of the dislocations relax. This relaxation changes the interaction force between dislocations and may thus significantly affect the mechanical properties of thin films. It is concluded that interaction between interface dislocations may not be responsible for the high temeprature strength of aluminum films.
机译:已经通过透射电子显微镜(TEM)研究了Al-Cu薄膜中的位错结构。我们观察到,界面位错的对比度在电子束中消失。我们假设对比度溶解是由于在结晶/非晶界面处的位错芯的扩散,或者由于通过氧化物的位错的漫射运动而导致。在任何情况下,假定放松通过照射诱导的扩散来控制。结果,短程应力和至少部分地还放松了脱位的长距离应力。这种弛豫改变了位错之间的相互作用力,因此可以显着影响薄膜的机械性能。结论,界面位错之间的相互作用可能不对铝膜的高温强度负责。

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