Hard carbon films can be prepared by the condensation of energetic carbon species at or below room temperature. These amorphous films are primarily tetrahedrally coordinated and contain high fractions of sp~3 bonds leading to the terminology amorphous diamond. These films have been successfully doped with phosphorus up to 1 at.percent, by other researchers by using a phosphorus doped graphite target. We have also investigated evaporated phosphorus in conjuction with a filtered cathodic arc to incorporate phsophorus into the films and have successfully incorporated phosphorus up to 40 at.percent into our films using this technique. XPS showed that some of the phosphorus was clustered. PEELS revealed that with an incorporation of 40 at.percent of phosphorus, the sp~3 content was approximately 20percent.
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