Within a few years development in read-out technology will enable optical disc formats with linear densities of almost 2.5 times the DVD linear density. Mastering these format set very tight requirements for the resolution and the mechanical stability of the equipment. Mastering for these formats will be possible by a combination of deep UV recording wavelength, high contrast photoresist processes and the evolution of existing servo mechanical systems. The experimental work in under way at the time of submission, the results will be presented at the conference.
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