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METHOD FOR MANUFACTURING OPTICAL DISK MASTER DISK, OPTICAL DISK MASTER DISK, OPTICAL DISK AND OPTICAL DISK MASTER DISK EXPOSURE DEVICE

机译:制造光学光盘母盘,光学光盘母盘,光学光盘和光学光盘母盘曝光装置的方法

摘要

PROBLEM TO BE SOLVED: To manufacture an optical disk master disk in which the pit width is reduced while keeping a proper asymmetry value by adding a concave pulse to a recording signal when forming a pit having a prescribed length.;SOLUTION: A recording signal generating part 30 generates a recording signal in which the relation between the voltage Vp of the rising and falling of a pulse and at least a part of middle voltage Vm is made into VmVp. A modulation part 9 modulates recording light by using the recording signal generated by the recording signal generating part 30. A glass master disk on which a photoresist is applied is irradiated with recording light. In addition, the relation of VmVp is attained provided that the spot diameter w of the recording light used for the pattern exposure of a pit sequence is in the relation of w0.65 r with respect to the spot diameter r of reproducing light.;COPYRIGHT: (C)2002,JPO
机译:解决的问题:制造一种光盘母盘,其中当形成具有预定长度的凹坑时,通过在记录信号上加上凹入脉冲,在保持适当的不对称值的同时减小凹坑宽度;解决方案:产生记录信号部分30产生记录信号,其中脉冲的上升和下降的电压Vp与中间电压Vm的至少一部分之间的关​​系被设为Vm <Vp。调制部分9通过使用由记录信号产生部分30产生的记录信号来调制记录光。向记录有光致抗蚀剂的玻璃母盘照射记录光。另外,如果凹坑序列的图案曝光所使用的记录光的光斑直径w相对于再生光的光斑直径r为w0.65r,则成为Vm <Vp的关系。 ;版权:(C)2002,日本特许厅

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