Study of low-debris plasma source produced by high power laser

摘要

Laser-produced plasma is an attractive table4op x-ray source for many applications, such as microscopy and lithography. Soft x-ray conversion efficiency depends strongly on the laser parameters in use and the produced debris with metal target isan intolerable side-effect in some applications. In this paper, we will optimize laser parameters for the yield of soft x-ray, give the experimental results of low debris solid state CO{sub}2 target.