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Collector with a grazing incidence for lasers - produced plasma sources
Collector with a grazing incidence for lasers - produced plasma sources
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机译:激光掠射收集器-产生的等离子体源
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摘要
Sources - collector system for euv - and x-rays - applications, for example, in the case of 13,5 nm, comprising a collector with a grazing incidence (grazing incidence collector) in combination with a laser-generated plasma (lpp) - jellyfish.
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