A planar vibratory gyroscope using electrostatic actuation and electromagnetic detection is proposed. The gyroscope has large sensitivity and can be fabricated by using surface micromachining, bulk micromachining and conventional machining technology. In this paper, the gyroscope and the electromagnetic detecting system equations are derived to determine the output characteristics for the planar vibratory gyroscope using electrostatic actuation and electromagnetic detection. The maximum output is obtained when the driving frequency equals to the detecting frequency. The resonant frequencies of the resonator are determined by the beam stiffness. The expected resonant frequencies are 200Hz both and the sensitivity is 62mV/deg/sec with 2345 electronic circuit amplifying coefficient for an AC drive voltage of 3V with a DC bias voltage of 15V and DC field current of 50mA. The feasibility of electromagnetic detection is demonstrated by the vibration test using the piezo actuator.
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