首页> 外文会议>Conference on Hard X-Ray and Gamma-Ray Detector Physics,Optics,and Applications >Development of the large-area silicon PIN diode with 2 millimeter-thick depletion layer for hard x-ray detector (HXD) on board ASTRO-E
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Development of the large-area silicon PIN diode with 2 millimeter-thick depletion layer for hard x-ray detector (HXD) on board ASTRO-E

机译:在Astro-e上的硬X射线探测器(HXD)的2毫米厚的耗尽层的大面积硅引脚二极管的研制

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ASTRO-E is the next Japanese x-ray satellite to be launched in the year 2000. It carries three high-energy astrophysical experiments, including the hard x-ray detector (HXD) which is unique in covering the wide energy band from 10 keV to 700 keV with an extremely low background. The HXD is a compound-eye detector, employing 16 GSO/BGO well-type phoswich scintillation counters together with 64 silicon PIN detectors. The scintillation counters cover an energy range of 40 - 700 keV, while the PIN diodes fill the intermediate energy range from 10 keV to 70 keV with an energy resolution about 3 keV. In this paper, we report on the developments of the large area, thick silicon PIN diodes. In order to achieve a high quantum efficiency up to 70 keV with a high energy resolution, we utilize a double stack of silicon PIN diodes, each 20 by 20 mm$+2$/ in size and 2 mm thick. Signals from the two diodes are summed into a single output. Four of these stacks (or eight diodes) are placed inside the deep BGO active-shield well of a phoswich counter, to achieve an extremely low background environment. Thus, the HXD utilizes 64 stacked silicon PIN detectors, achieving a total geometrical collecting area of 256 cm$+2$/. We have developed the 2 mm thick silicon PIN diodes which have low leakage current, a low capacitance, and a high breakdown voltage to meet the requirements of our goal. Through various trials in fabricating PIN diodes with different structures, we have found optimal design parameters, such as mask design of the surface p$+$PLU$/ layer and the implantation process.
机译:Astro-e是2000年的下一个日本X射线卫星。它带有三个高能的天体物理实验,包括硬X射线检测器(HXD),这些实验是覆盖10kev的宽能源乐队的独特到700 kev,有一个极低的背景。 HXD是一种复合眼探测器,采用16个GSO / BGO型铜型闪烁计数器以及64个硅引脚探测器。闪烁计数器覆盖40 - 700 keV的能量范围,而引脚二极管填充中间能量范围从10kev到70kev,通过大约3keV的能量分辨率。在本文中,我们报告了大面积厚硅销二极管的发展。为了通过高能量分辨率实现高达70keV的高量子效率,我们利用双堆叠的硅销二极管,每叠20乘20毫米$ + 2 $ /尺寸和2毫米厚。来自两个二极管的信号总结为单个输出。这些堆叠(或八个二极管)中的四个放置在一个伪影的深层BGO主动屏蔽井内,实现了极低的背景环境。因此,HXD利用64个堆叠的硅引脚探测器,实现了256厘米$ + 2 $ /的总几何收集区域。我们开发了具有低漏电流,低电容和高击穿电压的2毫米厚的硅引脚二极管,以满足我们目标的要求。通过各种试验在用不同的结构制造PIN二极管,我们已经找到了最佳的设计参数,例如表面P $ + $ PLU $ /层和植入过程的掩模设计。

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