P-2: Performance Improvement Obtained for Prepatterned Laser-Recrystallized TFTs

摘要

The order in which the active area is defined and laser recrystallized is shown to have a significant impact on the resulting grain microstructure, and therefore thin-film transistor (TFT) performance. We show that "prepatterning" the active area before excimer laser recrystallization can dramatically improve device performance.