In this paper, an analytical approach based on the energy relationship between microcomponents has been applied to derive the characteristics of a square diaphragm silicon micropump to consider its nonlinear effects. The methodology caters for all relevant energy terms corresponding to the stiffness of the diaphragm including bending, tensile, stretch forces, the mass of the diaphragm, and of the air in the vicinity of diaphragm. The stiffness of the pump chamber and the input/output tube, the fluidic mass and the frictional losses of the input/output tube are also incorporated in the model. Equivalent electrical circuit is derived to calculate the lumped parameters using the energy expressions. The approach is applied to the pneumatically driven micropump.
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