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Electron field emission from diamond-carbon thin films and amorphous carbon-polyimide composite films

机译:金刚石碳薄膜和无定形碳 - 聚酰亚胺复合膜的电子场发射

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Electron emission was obtained from discontinuous diamond thin films containing numerous carbon inclusions (diamond- carbon films) which were deposited on Mo using microwave chemical vapor deposition techniques. The films were characterized by X-ray diffraction, X-ray photoelectron spectroscopy and scanning electron microscopy. The square resistance of the films varied from 3 K approximately ega to 20 M approximately ega@, and the maximum emission current of 1.4 mA was obtained from a broad emitting area of 15 $MUL 5 mm$+2$/. The Fowler-Nordheim (FN) behavior of some samples was piecewise linear, which was similar to the typical FN curves of p-type silicon. A simple field emission device was demonstrated using the diamond-carbon cold cathode. The lower turn-on electrical field and higher current density was obtained from amorphous carbon-polyimide films deposited on silicon substrate by pulse laser deposition for the first time. The locations of electron emission sites were observed using transparent conducting anode technique.
机译:从含有许多碳含量(金刚石 - 碳膜)的不连续金刚石薄膜获得电子发射,该碳含量使用微波化学气相沉积技术沉积在Mo上。通过X射线衍射,X射线光电子体光谱和扫描电子显微镜表征薄膜。薄膜的方形电阻从3 k变化约EGA至20米,大约为EGA @,1.4 mA的最大排放电流从15毫米5 mm $ + 2 $ /的广播区域获得。一些样品的Fowler-Nordheim(FN)行为是分段线性,其类似于P型硅的典型FN曲线。使用金刚石 - 碳冷阴极对简单的场发射装置进行说明。通过脉冲激光沉积首次从沉积在硅衬底上沉积在硅衬底上的无定形碳聚酰亚胺膜获得下开启电场和更高的电流密度。使用透明导电阳极技术观察电子发射位点的位置。

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