Metal insulator semiconductor structure single crystal silicon liquid crystal light valve

摘要

Detailed description of the structure, operation, fabrication, and performance of a fast-response metal- insulator-semiconductor structure single crystal silicon liquid crystal light valve (MIS-Si-LCLV) is given. A 45$DGR twisted nematic liquid crystal configuration has been utilized. A MIS-Si-LCLV is demonstrated with a limiting resolution of 40 lp/mm over a 45 mm aperture and contrast ratios of $GRT 50:1, input light sensitivities at $lambda $EQ 930 nm ($Delta$lambda $EQ 40 nm) of better than 30 $mu W/cm$+2$/ and response times as fast as 20 ms have been measured.