Recognizing crystal flaws in silicon single crystals comprises irradiating surface of single crystal shell and recognizing arrangement of silicon non-metal compound crystal from scattered light

摘要

Recognizing crystal flaws in silicon single crystals comprises irradiating the surface of the single crystal shell and recognizing the arrangement of the silicon non-metal compound crystal from the scattered light and thus the flaws in the crystal. An Independent claim is also included for a device for recognizing crystal flaws in silicon single crystals comprising an illuminating device (3), an optical magnifying device (2) and a receiving device (6) for the single crystal.