A versatile defectivity monitor designed for efficient test and failure analysis

摘要

This paper describes development, design, and test of a short flow defectivity monitor. Careful considerations were given to size the structures and to arrange them in a fashion that allows both efficient test and efficient failure analysis. Test time was saved by using a two-step probe method. A coarse pass was used to test wafers for defects. Then specific defects were localized with additional testing.