Modern society has been drastically changed by the rapid development of miniature science and engineering. In order to improve the microsystem and nanotechnology education, we developed a student-centered experimental module for two laboratory-intensive courses: Micro/Nano Technology and Microelectromechanical Systems (MEMS) Engineering. The experimental module emphasizes hands-on experience and it is seamlessly integrated into the course structures. The developed laboratory activities include photomask layout design, photolithography, isotropic and anisotropic wet etching, bulk micromachining, optical microscopy, surface profiling based on light interferometry, scanning electron microscopy (SEM), and atomic force microscopy (AFM). The students benefit from gaining a better understanding of the course topics by designing their own structures that meet the design requirements and by fabricating their own devices. The laboratory results are satisfactory and show that the experimental module is effective in teaching microsystems and nanotechnology at both the undergraduate and graduate levels.
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