Analysing HREM images of III-V compounds, a fuzzy logic approach is developed to study interdiffusion phenomena in layered structures by using the monotonous relation of "image similarity" and "chemical composition" under appropriate imaging conditions. Simulated and experimental HREM images of GaAs/P (As/P variation) and Al/GaAs (Al/Ga variation) are analysed by fuzzy logic image processing to extract chemical reliefs.
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