A linear phased array of programmable micromirrorsprovides dual mode motion. The micromirrors can be individuallyrotated about an axis through a mirror, and the whole mirror canbe translated perpendicular to the mirror surface. Rotationalmotion adds the flexibility of constructing piecewise linearapproximations to a desired phase modulation profile, enablingspatial phase modulation with higher diffraction efficiency thanachievable with only translation. A new interferometer using on-chip stationary reference micromirror to calibrate the motion of themovable micromirror is presented. The coherent behavior of themicromirror array is also demonstrated. Applications includespatial scanning, and ultrashort-pulse shaping.
展开▼
