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Development and calibration of UV/VUV radiometric sources

机译:UV / VUV辐射测量源的开发和校准

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A program exists at NIST to calibrate radiometric sources for the spectral range from 118 - 350 nm. These include deuterium lamps, hollow-cathode lamps, rf-excited dimer lamps, and wall-stabilized argon arcs. Sources have been calibrated for and used by researchers in solar physics, astrophysics, atmospheric physics (ozone measurements), magnetically controlled fusion, and photobiology. The argon arcs were developed in our laboratory, and provide intense sources of both radiance and irradiance. Calibrations are performed relative to two primary sources, a wall-stabilized hydrogen arc and a 12,000 K black-body line arc, both developed in our laboratory. Also, we recently have begun periodic calibrations on the NIST storage ring, SURF II, to insure consistency between our respective radiometric bases. Various sources have been calibrated for space applications, including several which are flyable. Also, some development and testing of radiometers for semiconductor lithography were recently carried out with an intense argon arc source.
机译:在NIST处存在一个程序以校准从118-350nm的光谱范围的辐射源。这些包括氘灯,空心阴极灯,RF激发二聚体灯和壁稳定的氩弧。太阳能物理学,天体物理学,大气物理(臭氧测量),磁控融合和光生物学的研究人员已经校准并使用了来源。氩弧是在我们的实验室开发的,并提供了辐射和辐照的强烈来源。相对于两个主要来源进行校准,壁稳定的氢弧和12,000 k黑体线,在我们的实验室中开发。此外,我们最近在NIST储存环上开始了周期性校准,冲浪II,以确保各自的辐射碱基之间的一致性。对于空间应用,各种来源已被校准,包括可传单的几个。此外,最近通过强烈的氩气源进行了用于半导体光刻的辐射仪的一些开发和测试。

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