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Vibration control and isolation design for the Electrical Engineering/Computer Science Building University of Minnesota--Minneapolis Minnesota

机译:明尼苏达大学电气工程/计算机科学大学 - 明尼阿波利斯明尼苏达振动控制与隔离设计

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Design of the Electrical Engineering/Computer Science Building at the University of Minnesota included development of a very low vibration environment for research in submicron processes in microelectronics. The new facility which opened in 1988 has 325,000 gross square feet of space on six floors and cost approximately $DLR@35 million. The vibration control process consisted of: (1) establishing permissible vibration levels for extremely sensitive equipment, (2) monitoring site vibration, (3) isolating the microelectronics lab, (4) analyzing expected floor motion in the structure using finite element methods, and (5) isolating the HVAC mechanical equipment. The permissible floor vibration for the facility was 100 $mu in/sec for the microelectronics floor and 1,000 $mu in/sec for the remainder of the facility. Since there were several large engineering buildings and a main vehicular thoroughfare directly adjacent, vibration measurements taken at the site during the design phase showed the maximum ground surface and floor motion to be 1,350 $mu in/sec and motion in the bedrock level at only 40 $mu in/sec. A two-foot thick, solid, reinforced concrete floor was designed for the microelectronics lab, supported on three-foot diameter caissons down to bedrock, spaced on nine-foot centers and isolated from the soil. A computerized structural vibration analysis was completed with a finite element model of a typical bay of the entire building to predict response of the building to ambient and equipment excitation. The results of these predictions along with the building performance test data show the floor motion to be less than permissible levels.
机译:明尼苏达大学电气工程/计算机科学建设的设计包括在微电子中亚微米工艺研究的一个非常低的振动环境的开发。在1988年开放的新设施在六层楼上拥有325,000个庞大的空间,并且花费大约是DLR @ 3500万。振动控制过程包括:(1)建立极其敏感设备的允许振动水平,(2)监测现场振动,(3)使用有限元方法分析预期地板运动,(4)使用有限元方法分析该结构的预期地板运动。 (5)隔离HVAC机械设备。该设施的允许地板振动为100美元/秒,用于微电子地板,适用于该设施的其余部分,1,000美元亩。由于有几座大型工程建筑和主要的车辆通道直接相邻,因此在设计阶段的场地上拍摄的振动测量显示,最大地面和地板运动为1,350美元,并且仅在基岩水平中的运动和运动中的运动。 $ mu / sec。为微电子实验室设计了双脚厚,坚固,钢筋混凝土底板,支撑在三英尺直径的沉箱上,向基岩,在九英尺中心间隔开并与土壤隔离。通过整个建筑物的典型湾的有限元模型完成了计算机化结构振动分析,以预测建筑物与环境和设备励磁的响应。这些预测结果以及建筑物性能测试数据的结果显示楼层运动小于允许的水平。

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