Stoichiometry of laser-deposited Bi-Sr-Ca-Cu-O films on silicon and mass spectrometric investigations of superconductors

摘要

High-T$-c$/ superconducting Bi-Sr-Ca-Cu-O films on single crystal silicon substrates were prepared by laser induced plasma deposition. The stoichiometric change of cation concentrations of sintered target material to the thin film using a Nd:YAG and an excimer laser for the deposition is compared. Laser ionization and spark source mass spectrometry (SSMS and LIMS) were applied for the trace and cluster analysis of YBa$-2$/Cu$-3$/O$-x$/ and Bi-Sr-Ca-Cu-O ceramics.