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Next-Generation Copper, Nickel and Lead-Free Metallization Products for Next-Generation Devices and Applications

机译:下一代铜,镍和无铅金属化产品用于下一代装置和应用

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Next-generation plating products that are developed for flip-chip and 3-D packaging applications must be able to meet an ever more challenging set of performance requirements before next-generation devices can be realized. Device architectures and patterns are not only decreasing in size, but they are also becoming more complex in die design and layout. Additionally, the drive to increase throughput by increasing the electrodeposition rates has increased the performance metrics to which plating products must be able to achieve. Because of this, next-generation products such as copper pillar, nickel and SnAg as a lead-free solder are required that are able to electroplate high quality deposits which will allow for highly-reliable, efficient and cost-effective microelectronic device fabrication processes. Furthermore, as the industry moves from traditional C4 SnAg bumping processes to copper pillar with SnAg caps with decreasing feature sizes (Figure 1), a premium is placed on intermetallic integration and compatibility with minimal pre- and post-reflow defects.
机译:为倒装片和3-D包装应用开发的下一代电镀产品必须能够在实现下一代设备之前满足更具挑战性的性能要求。设备架构和模式不仅逐渐减小,而且在模具设计和布局中也变得更加复杂。另外,通过增加电沉积率来增加吞吐量的驱动器增加了电镀产品必须能够实现的性能度量。因此,需要铜柱,镍和依销作为无铅焊料等下一代产品,其能够电镀高质量的沉积物,这将允许高度可靠,高效且经济高效的微电子器件制造工艺。此外,随着行业从传统的C4障碍物碰撞过程与带有减小的特征尺寸的吊盖(图1)从传统的C4 SnaG碰撞过程中移动到铜柱(图1),将溢价放在金属间集成和回流后和回流后缺陷中。

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