A new kind of Multi-Notched Flexure Hinges Based 3-RRR Micro-Positioning Stage

摘要

A 3-RRR compliant parallel mechanism based on Multi-Notched Flexure Hinges (MNFH) is designed in this study. According to the inverse kinematics of the 3-RRR parallel mechanism, the length of the rod is determined, and a 3-RRR compliant mechanism with workspace larger than the circle with a radius of 70um is designed. Then the Jacobian matrix of the mechanism is solved by the closed loop vector method, and the working space, input coupling and maximum stress of the mechanism are analyzed by using finite element simulation via ANSYS. Compare with the mechanism with traditional right circular flexure hinges (RCFH), the input coupling property of the stage based on MNFH is better, which is well validated by the simulation and experimental studies.