Influences of sputtering process factors on wear resistance of TiN coated on a machine component

摘要

In this work,effects of sputtering process factors including DC current,pressure and Ar to N2 flow rate ratio on wear resistance of TiN coated on cast stainless steel of a fishing net-weaving machine part namely,an upper hook were systematically investigated using 2* factorial design,analysis of variance(ANOVA)and other statistical tools.Wear testing experiments of the TiN coated upper hooks were carried out on the real fishing net weaving machine.A normal probability of effects and main and interaction effect plots of process factors were constructed in order to identify the statistically significant process factors and to determine an appropriate operating condition of the process factors with the lowest weight loss.The Ar to N2 flow rate ratio and the interaction between the pressure and the Ar to N2 flow rate ratio were found to be statistically significant while pressure and sputtering DC current were not statistically important.