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A Method to Remotely Measure Amplitudes of Surface Vibrations with a Conventional Michelson Interferometer

机译:一种远程测量与常规迈克尔逊干涉仪表面振动幅度的方法

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This paper introduces a method to measure the amplitude of surface vibrations using a conventional Michelson interferometer. Such amplitudes may be far greater than half of the used laser's wavelength. With relatively simple signal processing it is possible to measure amplitudes at a precision that is similar to or better than the precision of the fringe counting method (FCM) and that is hardly affected by the varying tilt an oscillating surface may exhibit during the reflection of the laser beam. The proposed method allows for monitoring amplitudes which proved to be too small to be reliably measured by our version of the FCM. Using a 532 nm laser and sampling rates of 192 kHz amplitudes up to 133 μm during vibrations at 79 Hz can be measured. The sensor is easy to construct and calibrate, much cheaper than conventional multi-wavelength interferometers and does not have the need for complex signal processing.
机译:本文介绍了一种使用传统的迈克尔逊干涉仪测量表面振动幅度的方法。这种幅度可能远远超过二手激光波长的一半。利用相对简单的信号处理,可以以与边缘计数方法(FCM)的精度类似或更好地测量幅度,并且几乎不会受到变化倾斜的影响,振荡表面可以在反射期间呈现激光束。所提出的方法允许监控被证明的幅度太小,不能通过我们的FCM版本可靠地测量。在79Hz的振动期间,使用532nm激光器和192kHz幅度的采样率,可以测量高达133μm的79 Hz。传感器易于构造和校准,比传统的多波长干涉仪便宜得多,并且不需要复杂的信号处理。

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