Gas Density and Viscosity Measurement Using Micro-Cantilever Sensor

摘要

High sensitivity and accuracy on density and viscosity measurement, especially in low pressures, can only be achieved using MEMS based sensors. In the current investigation, micro-cantilever beam from the area of atomic force microscopy was selected for the measurement of gas density and viscosity. The excitation of the beam was based on electromagnetic force, while the out of plain motion of the cantilever beam was detected with integrated piezo-resistors. The gas density and viscosity were calculated through the measurement of the resonance frequency and the quality factor. Verification of the sensor accuracy made in pure gases and mixtures as Helium, Argon, Nitrogen, Oxygen, Carbon Dioxide and Neon in atmospheric pressure. The measurement error of density and viscosity did not exceed the 2%.