Changes in Surface Morphology, Deflection and Wear of Microcrystalline Diamond Film Observed During Sliding Tests Against Si_3N_4 Balls

摘要

The study investigates alterations in surface morphology of microcrystalline diamond (MCD) film under reciprocating sliding test conditions. The MCD film was grown by microwave plasma enhanced chemical vapor deposition (MW-PECVD) on (100)-oriented Si wafer. The surface morphology was characterized by optical microscopy, scanning electron microscopy (SEM), atomic force microscopy (AFM) and mechanical profilometry. The formation of ripples on the wear scar surfaces was observed. The normalized wear rate (mm~3/mN) of diamond film was evaluated in order to understand the influence of diamond film deflection to wear.