Facility for the calibration of radiation sources in the UV and VUV at the Metrology Light Source

摘要

The Physikalisch-Technische Bundesanstalt, the German national metrology institute, performs the calibration of radiation sources traceable to an electron storage ring as a calculable primary source standard in the UV and VUV spectral range for more than 25 years. A facility for the calibration of radiation sources covering the UV and VUV spectral range from 7 nm to 400 nm using the Metrology Light Source as a primary radiation source standard is now under construction and will be fully operational at the end of 2011.