X-ray active matrix pixel sensors based on J-FET technology developed for the Linac Coherent Light Source

摘要

An X-ray Active Matrix Pixel Sensor (XAMPS) is being developed for recording data for the X-ray Pump Probe experiment at the Linac Coherent Light Source (LCLS). Special attention has to be paid to some technological challenges that this design presents. New processes were developed and refined to address problems encountered during previous productions of XAMPS. The development of these critical steps and corresponding tests results are reported here.