Spatially Resolved Measurement of Magnetic Flux Density Using a 32x32 CMOS-Integrated Hall Sensor Array

摘要

This paper reports on a novel application for an array of 32x32 field-effect transistors (FETs) each equipped with four source/drain contact. When the FETs are operated as Hall sensors, the array can be used in a high-precision, three-dimensional micro-positioning device by resolving the spatial distribution of magnetic flux densities. Lateral and out-of-plane resolutions (2σ) of 3.6 μm and 16 μm respectively, were achieved. More generally, the presented method is perfectly suitable for other applications such as the experimental investigation of the performance of miniaturized magnetic concentrators and, more generally, whenever the spatial distribution of magnetic fields is of interest.