Research on the Mechanical Design of Two-Axis Fast Steering Mirror for Optical Beam Guidance

摘要

In this work, Two-Axis Fast Steering Mirror (FSM) was designed to facilitate the fast and precise positioning for an optical bundle of a Three Dimensional (3D) scanner consists mainly of a Laser Range Finder (LRF) and a Complementary Metal-Oxide-Semiconductor (CMOS) camera. The FSM system architecture, mirror structure, compliant mechanisms' design, and actuators' selection were discussed in details. Meanwhile, the system analysis results were clearly depicted based on 3D solid modeling and Finite Element Method (FEM) analysis. The FSM design was designed to achieve a clear elliptical optical aperture of 2 × 3 inch, bandwidth of 1 KHz, and an optical rotational angle of ±2 mrad. Finally, a general discussion for the FSM system enhancement was introduced for further optimization processes.