Optical mirror assembly for beam guidance and mirror tempering device with such a mirror assembly

摘要

The optical mirror component (2) has a mirror base (6) which supports a reflecting surface (5). The solid foam regions (9,10) of mirror base are arranged below the reflecting surface and are in heat-conducting connection with reflective surface. The solid foam regions are connected to a fluid source (4) via fluid channels (27,29,32,33,36,37) and fluid connection portions (14-17), so that the heat exchange fluid is supplied from the fluid source to the solid foam regions. An independent claim is included for mirror temperature control device.