Deposition of Full Dielectric Solar Control Stack on Polymer Films Using a Combined PVD/PECVD Approach

摘要

Solar control films based on thin silver layers are well known. However, the need of high performance energy control coatings for windows in both cars and buildings is stimulating the search for new approaches. The contribution presents a full-dielectric layer stack based on the interference effect of high and low refractive index materials. Titania and silica are used for the high index material and for the low index material, respectively. The layers are deposited onto a polyester film in a continuous roll-to-roll process. Silica was deposited in a HMDSO atmosphere using a dual planar magnetron as plasma source. Titania was produced by reactive sputtering. It is demonstrated that this combined PVD-PECVD approach provides improved layer properties compared to the usage of sputtering only.