Structural and Optical Properties of Oxygen Irradiated Zn_(1-x)Mg_xO (x = 0, 0.2) Thin Films

摘要

In the present study we report the effect of oxygen ion beam irradiation on the structural and optical properties of pure and 20% Mg doped ZnO thin films. These films were grown on Si substrate using RF sputtering technique. X-ray diffraction study confirms the formation of hexagonal wurtzite phase and the lattice parameter is found to reduce by Mg incorporation which further decreases after irradiation. The optical properties of the thin films using UV-Vis spectroscopy technique indicate an increment in the optical band gap with Mg incorporation as well as after irradiation.