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Sputtered Transparent Conductive ITO/Ag/ITO Films by Roll to Roll Processing

机译:通过滚动滚动加工溅射透明导电ITO / ITO薄膜

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A roll of transparent conductive ITO/Ag/ITO film was prepared by Roll to Roll sputtering. The effects of deposition parameters on microstructure, electrical and optical properties of films were investigated. We obtained the optimum properties of films with a sheet resistance of 8.6±0.2Ω/□ and an optical transmittance of 86.6±0.5% at λ=550nm.
机译:通过辊辊溅射制备一卷透明导电ITO / AG / ITO膜。研究了研究沉积参数对微观结构,电气和光学性质的影响。我们获得了8.6±0.2Ω/□的薄膜的最佳特性,并且在λ= 550nm处的光透射率为86.6±0.5%。

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