Study on La_2O_3 Wet Clean by pH Controlled Functional Water

摘要

In this paper, we discuss the mechanism as well as the methodology of the La_2O_3 dissolution and its inhibition by functional waters. To clarify the mechanism, the La_2O_3 etching behavior in the various solutions, the surface state of La_2O_3 before and after cleaning, and the impact of functional water process on the electrical properties are evaluated. In order to control the La_2O_3 dissolution, a functional water process with a CO_2 dissolved water as well as an ultra-diluted NH_4OH have been developed. As a result of this study, it could be concluded that the pH control of the wet solutions plays an important role in terms of controlling the La_2O_3 dissolution.