Design of Minimal Capacitance Detect Circuit for MEMS Capacitive Sensor

摘要

The capacitance among the structure of the accelerometer is rather small, usually at sub-pF level. Detection of the capacitance among the sensor's tiny structure and analysis of the variation of these capacitances are necessary to improve the sensor's performance. In this paper, one capacitance detect circuit for minimal capacitance is designed. Simulation and experiment results indicate a good linearity when the circuit is applied to detect capacitance range from 0.5pF to 5pF.