Non-destructive rapid inspection methods for spatial light modulator using swept source optical coherence tomography

摘要

A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15μm and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.