Optical coherence - interferometry and coherence - tomography, ducks light sources with spatially part

摘要

A method for carrying out of the short coherence - interferometry " z - scan " or low - scan in the measurement of the depth position method mittierender object structures in the optical coherence - interferometry and in the optical coherence tomography by adjustment of the optical length of the reference arm of a two beam - interferometer to the optical length of the measuring arm member by means of the two beam - interferometer output occurring interferences, characterized in that spatially partially coherent light sources are used and the object with the image (15) of this primary light sources (14, 19) or the, by imaging derived from the secondary light source (20 or 23) is scanned.