Resonant Nanoprobe with Integrated Measurement System

摘要

The simulation, the design and the fabrication of a resonantly oscillating non-contact probing system (uniaxial nanoprobe) will be presented. The fully integrated actuator-sensor design and the small tip ball diameters down to 10 μm (due to silicon micromachining) are the main advantages of the nanoprobe that comprises a vertical electrostatic actuator and a differential capacitive sensor. System integration including the stylus with the tip ball has been realized on silicon-on-insulator (SOI) substrates.