Fabrication of micro/nano-fluidic channels by single-beam direct femtosecond laser writing

摘要

In this paper, we report on the formation of micro/nano-fluidic channels inside fused silica glass using single-beam femtosecond laser. The micro/nano-fluidic channels are fabricated by controlling the irradiation conditions of the femtosecond laser pulses, especially, pulse energy and scanning speed. We examine the production of this kind of channels both in air and water. In both cases, laser beam is focused inside the glass bar and shined horizontally with very low scanning speeds. In case of water, the glass sample is placed inside distilled water, which way is expected to reduce the surface roughness of the channels. The quality of the channels fabricated under different environment is compared as well. We further investigate the influence of various laser parameters on the production of channels. We also evaluate the fluid flowing ability of the fabricated micro/nano-fluidic channels of various diameters, fabricated under different environment and irradiation conditions.