Current Sensor based on Nanocrystalline NiFe/Cu/NiFe Thin Film

摘要

The nanocrystalline NiFe/Cu/NiFe thin films were fabricated via a facile sputtering method in order to improve the current sensor performance. Further, the resulting thin films were characterized by means of X-ray diffraction, Field emission scanning electron microscopy, Atomic force microscopy and Hysteresis techniques for their structure, morphology and magnetic properties. In the present work NiFe/Cu/NiFe thin film based current sensor device length is varied and the influence of device length on current sensor performance and sensitivity were investigated. The length of device is varied from 2 to 8 mm and current sensor performance increases because of mean free path length goes on decreasing and electron may be reach the boundary of material and scattered. The highest sensitivity for the device is found to be 0.76 ΩOe~(-1).