Highly efficient current sensor built on a chip based on nanocrystalline NiFe/Cu/NiFe thin film

摘要

We discuss here the realization of a grand vision of a smart GMR device for an on-chip current sensor. The device was characterized to confirm a strong antiferromagnetic coupling and their contribution to giant magnetoresistance. To achieve high sensitivity, we explored different prototypes of device. The GMR sensor is well suited for current sensing as it possesses desired linearity and high sensitivity of 1.32 Omega Oe(-1). The result reveals thickness and number of bilayers play an important role in the magnetization to stay aligned to the current channel. This study brings us a step closer to an ideal on-chip current sensor. (C) 2017 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.