Microstructure control of WO_3 film by adding nano-particles of SnO_2 for NO_2 detection in ppb level

摘要

To fabricate more excellent NO_2 sensor with high sensor response and good linearity between the sensor response and NO_2 concentration, the microstructure of WO_3 lamellae was controlled by adding nano-particles of SnO_2. It was found that the sintering of WO_3 lamellae was inhibited by adding nano-particles of SnO_2. The device using WO_3 lamellae added a small amount of SnO_2 nano-particles had the highest sensor response, exhibiting a high sensor response (S = 60-540) even to dilute NO_2 (100-1000 ppb) in air at 200°C.