Inorganic membranes are promising for possible application to high temperature separation systems and membrane reactor systems [1-3]. Metal membranes, which shows 100% selectivil to hydrogen and high permeances at temperatures, have several disadvantages such as expensive cost, degradation with hydrocarbon and acid gases, and hydrogen brittleness at low temperatures. On the other hand, amorphous silica, which can be derived from the sol-gel processing or CVD (Chemical vapor deposition), is a microporous material, consisting of silica network which allows the permeation of small molecules such as helium and hydrogen.
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